旋转y型石英的声板模特性

C. Jeffrey, M. Schweyer, J.F. Vetellino
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引用次数: 10

摘要

最近对流体相操作的紧凑、低成本、精确的传感器的需求在很大程度上没有得到满足。其中最有前途的技术是压电传感器。压电传感器直接检测由分析物引起的机械和电气性能变化,因此可以对流体流进行连续监测。目前的努力方向是发展微量离子(如汞)和生化(如DNA、抗体、毒素)检测。已经提出了几种候选结构,其中许多已被证明是可行的流体相传感;然而,迄今为止发表的最好的实验压电传感器结果采用了SHAPM结构。传感器检测到约10 ng/ml的汞、人IgG和霍乱毒素等分析物,并采用铌酸锂平板模式装置。x传播z切割(ZX)铌酸锂晶圆具有低传播损耗、高质量灵敏度、高电耦合和单一电优势声模式。主要缺点是材料的温度稳定性差(-78 ppm//spl°/C)。为了获得更好的结果,必须克服铌酸锂的残余温度不稳定性,同时又不能大大牺牲其优势性能。为了实现这一目标,目前的工作分析了石英晶体中潜在的温度稳定的平板模式,以寻找在流体载荷下具有低传播损耗的优势、温度稳定、电效率高、质量敏感的声学模式。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Acoustic plate mode properties of rotated Y-cut quartz
Recent demands for compact, low cost, accurate sensors for fluid phase operation have been largely unmet. Among the most promising technologies are piezoelectric sensors. The piezoelectric sensors directly detect mechanical and electrical property changes caused by the analyte and are thus amenable to continuous monitoring of fluid streams. The current effort is directed towards the development of trace ion (e.g. mercury) and biochemical (e.g. DNA, antibodies, toxins) detection. Several candidate structures have been proposed and many have been shown to be feasible for fluid phase sensing; however, the best experimental piezoelectric sensor results published to date employed the SHAPM structure. The sensors detected approximately 10 ng/ml of such analytes as mercury, human IgG and cholera toxin and employed lithium niobate plate mode devices. The X-propagating Z-cut (ZX) lithium niobate wafers provide low propagation loss, high mass sensitivity, high electrical coupling and a single electrically-dominant acoustic mode. The principal drawback is the poor temperature stability of the material (-78 ppm//spl deg/C). In order to obtain better results the residual temperature instability of lithium niobate must be overcome while not substantially sacrificing its advantageous properties. In order to accomplish this, the current work analyzes potentially temperature stable plate modes in quartz crystals for dominant, temperature-stable, electrically-efficient, mass-sensitive acoustic modes with low propagation loss under fluid loading.
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