Kuan-Yu Hsiao, W. Ho, Po-Yueh Cheng, C. Yeh, Ruei-Siang Sue, Yu-Tang Shen, C. Hu, Y. Deng
{"title":"超薄阳极氧化铝纳米孔模板的制备及光学表征","authors":"Kuan-Yu Hsiao, W. Ho, Po-Yueh Cheng, C. Yeh, Ruei-Siang Sue, Yu-Tang Shen, C. Hu, Y. Deng","doi":"10.1109/ISNE.2015.7132018","DOIUrl":null,"url":null,"abstract":"In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.","PeriodicalId":152001,"journal":{"name":"2015 International Symposium on Next-Generation Electronics (ISNE)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fabrication and optical characterization of ultra-thin anodic aluminum oxide nanoporous templates\",\"authors\":\"Kuan-Yu Hsiao, W. Ho, Po-Yueh Cheng, C. Yeh, Ruei-Siang Sue, Yu-Tang Shen, C. Hu, Y. Deng\",\"doi\":\"10.1109/ISNE.2015.7132018\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.\",\"PeriodicalId\":152001,\"journal\":{\"name\":\"2015 International Symposium on Next-Generation Electronics (ISNE)\",\"volume\":\"39 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 International Symposium on Next-Generation Electronics (ISNE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISNE.2015.7132018\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Symposium on Next-Generation Electronics (ISNE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISNE.2015.7132018","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication and optical characterization of ultra-thin anodic aluminum oxide nanoporous templates
In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.