NBTI应力对VDMOSFET区域的影响

S. M. Merah, Bouchra Nadji
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摘要

本文采用电容-电压法(C-V)研究了负偏置温度不稳定性(NBTI)退化对商用功率双扩散MOS晶体管(VDMOSFET)沟道和漏极区域的影响。我们报告了在p沟道VDMOSFET (n沟道VDMOSFET)的沟道(漏极)区域的退化是重要的。说明磷掺杂区(n型)对NBTI应力更敏感。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of NBTI Stress on VDMOSFET Regions
In this paper, we investigate the impact of negative bias temperature instability (NBTI) degradation on both channel and drain regions, of commercial power double diffused MOS transistor (VDMOSFET), using capacitance-voltage method (C-V). We report that the degradation is important at channel (drain) region in p-channel VDMOSFET (n-channel VDMOSFET). That means that the phosphorus doped region (n-type) is more sensitive to NBTI stress.
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