尖晶石型半导体电陶瓷厚膜NTC热敏电阻

2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716) Pub Date : 2004-05-16 DOI:10.1109/ICMEL.2004.1314873

I. Brunets, O. Mrooz, O. Shpotyuk, H. Altenburg

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引用次数: 9

摘要

采用尖晶石型半导体电陶瓷制备了Cu/sub 0.1/Ni/sub 0.1/Co/sub 1.6/Mn/sub 1.2/O/sub 4/ (No.1)、Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.21/Mn/sub 1.9/O/sub 4/ (No.2)、Cu/sub 0.8/Ni/sub 0.1/Co/sub 0.2/Mn/sub 1.9/O/sub 4/ (No.3)等不同成分的厚膜NTC热敏电阻。采用XRD、SEM和EDX对基体陶瓷和烧结厚膜进行了表征。1-2号陶瓷的厚膜密度和微观结构均匀性高于3号陶瓷。对平面厚膜和圆盘型NTC热敏电阻的电学参数进行了测定和比较。根据陶瓷的化学成分不同，所制备的厚膜元件的电阻率在2 /spl divide/ 40 /spl Omega//spl middot/m范围内，约为。比盘式热敏电阻大1-2个数量级。常数B/sub 25/85/的取值范围为2980 ~ 3690k。考虑到Cu/sub 0.1/Ni/sub 0.1/Co/sub 1.6/Mn/sub 1.2/O/sub 4/-和Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.2/Mn/sub 1.9/O/sub 4/基厚膜NTC热敏电阻良好的重现性和令人满意的灵敏度(TRC /spl alpha//spl les/- 4% /K值)，它们应该适合作为精确的温度传感器。

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Thick-film NTC thermistors based on spinel-type semiconducting electroceramics

Thick-film NTC thermistors based on spinel-type semiconducting electroceramics of different composition /Cu/sub 0.1/Ni/sub 0.1/Co/sub 1.6/Mn/sub 1.2/O/sub 4/ (No.1), Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.21/Mn/sub 1.9/O/sub 4/ (No.2), and Cu/sub 0.8/Ni/sub 0.1/Co/sub 0.2/Mn/sub 1.9/O/sub 4/ (No.3)/ were fabricated. Basic bulk ceramics and fired thick films were characterized by XRD, SEM and EDX microanalysis. Thick films of No. 1-2 ceramics showed higher density and microstructure homogeneity over those of No.3 ceramics. The electrical parameters of planar thick-film and disc-type NTC thermistors were determined and compared. Depending on chemical composition of ceramics, the prepared thick-film elements showed the resistivities in the range of 2 /spl divide/ 40 /spl Omega//spl middot/m, being approx. the 1-2 orders of magnitude larger over those of disc thermistors. The values of constant B/sub 25/85/ ranged from 2980 to 3690 K. Taking into account good reproducibility and satisfactory sensitivities (the values of TRC /spl alpha//spl les/-4 %/K) of Cu/sub 0.1/Ni/sub 0.1/Co/sub 1.6/Mn/sub 1.2/O/sub 4/- and Cu/sub 0.1/Ni/sub 0.8/Co/sub 0.2/Mn/sub 1.9/O/sub 4/-based thickfilm NTC thermistors, they should be suitable as accurate temperature sensors.

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2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716)

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