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用于直流，射频和光学应用的MEMS微开关

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984062
K. Suzuki
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摘要

本文综述了微机电系统(MEMS)微开关在直流、射频和光学领域的研究进展。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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MEMS micro-switches for use in DC, RF, and optical applications
In this paper, our works on Micro Electro Mechanical Systems (MEMS) micro-switches for use in DC, RF, and optical applications are reviewed.
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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)
Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)
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