用于光学器件的抗反射亚波长光栅结构的仿真

2009 9th International Conference on Numerical Simulation of Optoelectronic Devices Pub Date : 2009-10-30 DOI:10.1109/NUSOD.2009.5297202

Y. M. Song, Y. T. Lee

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引用次数: 11

摘要

采用严格耦合波分析方法，模拟了三种不同亚波长光栅(SWG)结构在光电器件中的衍射效率。研究了SWG结构高度和周期对反射率的影响。同时，对SWG结构的内外反射进行了仿真分析。

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Simulation of antireflective subwavelength grating structures for optical device applications

Diffraction efficiencies of three different types of subwavelength grating (SWG) structures were simulated for optoelectronic device applications using rigorous coupled wave analysis method. The effect of height and period of SWG structures on the reflectance were investigated. Also, the internal and external reflection from the SWG structures were simulated and analyzed.

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来源期刊

2009 9th International Conference on Numerical Simulation of Optoelectronic Devices

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