自然语言处理在半导体制造中的应用

2022 International Symposium on Semiconductor Manufacturing (ISSM) Pub Date : 2022-12-12 DOI:10.1109/ISSM55802.2022.10026893

Daisuke Kobayashi, Shunsaku Yasuda, Takashi Iuti, Shiho Ito

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引用次数: 0

摘要

近年来，自然语言处理在人工智能领域取得了很大的进展，引起了人们的关注。本文介绍了自然语言处理在半导体制造中的应用。在任何分析中都没有使用数值或图像数据。使用SONY开发的自然语言处理引擎，通过以Bag-of-Ngrams和卡方检验为代表的各种自然语言处理，我们能够单独从文本数据中分析质量故障的趋势，提取制造设备的特征。通过这种方式，它可以从不同的角度促进质量和生产力的提高。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Application of Natural Language Processing in Semiconductor Manufacturing

Recently, natural language processing has been making great progress in the AI field and is attracting attention. This paper describes the application of natural language processing in semiconductor manufacturing. No numerical or image data were used in any of the analyses. Using the natural language processing engine developed by SONY, we were able to analyze trends in quality troubles and extract features of manufacturing equipment from text data alone by performing various natural language processing represented by Bag-of-Ngrams and Chi-square test. By this, it can contribute to quality and productivity improvements from a different perspective.

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2022 International Symposium on Semiconductor Manufacturing (ISSM)

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