Momoka Matsumura, Yuna Koike, Ryo Seki, T. Yanagitani
{"title":"基于c轴倾斜ScAlN压电薄膜的剪切模式体声波型陀螺仪","authors":"Momoka Matsumura, Yuna Koike, Ryo Seki, T. Yanagitani","doi":"10.1109/INERTIAL56358.2023.10104023","DOIUrl":null,"url":null,"abstract":"Transmission and detection type piezoelectric gyroscope with two c-axis tilted ScAlN films are fabricated. By adjusting the in-plane tilt angles to 90 degrees, the polarities of shear wave generated at upper layer (input) cannot be detected at lower layer (output) at a still state. However, due to the Coriolis force, the in-plane rotation of shear wave polarity can be detected when the device is rotated. The transmission and detection type gyroscope device was simulated using Mason's equivalent circuit model.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Shear mode bulk acoustic wave type gyroscope based on c-axis tilted ScAlN piezoelectric films\",\"authors\":\"Momoka Matsumura, Yuna Koike, Ryo Seki, T. Yanagitani\",\"doi\":\"10.1109/INERTIAL56358.2023.10104023\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Transmission and detection type piezoelectric gyroscope with two c-axis tilted ScAlN films are fabricated. By adjusting the in-plane tilt angles to 90 degrees, the polarities of shear wave generated at upper layer (input) cannot be detected at lower layer (output) at a still state. However, due to the Coriolis force, the in-plane rotation of shear wave polarity can be detected when the device is rotated. The transmission and detection type gyroscope device was simulated using Mason's equivalent circuit model.\",\"PeriodicalId\":236326,\"journal\":{\"name\":\"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-03-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL56358.2023.10104023\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL56358.2023.10104023","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Shear mode bulk acoustic wave type gyroscope based on c-axis tilted ScAlN piezoelectric films
Transmission and detection type piezoelectric gyroscope with two c-axis tilted ScAlN films are fabricated. By adjusting the in-plane tilt angles to 90 degrees, the polarities of shear wave generated at upper layer (input) cannot be detected at lower layer (output) at a still state. However, due to the Coriolis force, the in-plane rotation of shear wave polarity can be detected when the device is rotated. The transmission and detection type gyroscope device was simulated using Mason's equivalent circuit model.
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