纳米技术的新方向:簇离子束技术

13th International Crimean Conference Microwave and Telecommunication Technology, 2003. CriMiCo 2003. Pub Date : 1900-01-01 DOI:10.1109/CRMICO.2003.158920

V. Popok, S. Prasalovich, E. Campbell

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引用次数: 1

摘要

本文简要介绍了簇离子与表面相互作用的研究进展。离子束束被认为是一种强大而通用的工具，用于修饰和处理表面和近表面层，作为离子注入和离子辅助沉积的替代方法。讨论了簇-表面碰撞的主要效应和簇离子束的可能应用。

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New direction in nanotechnology: cluster ion beam technique

A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.

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13th International Crimean Conference Microwave and Telecommunication Technology, 2003. CriMiCo 2003.

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