T. Zengerle, J. Joppich, H. Lensch, A. Ababneh, H. Seidel
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A Lumped Element Model for the Damping Mechanism of Micro-oscillators in the Transitional Flow Regime
This study presents a Lumped Element Model (LEM) for the different damping mechanisms of micro-oscillators oscillating in a gas medium near a boundary. The LEM is based on resistive and inductive components as well as on a newly introduced inductive constant phase element (CPE). The model is applied to experimental data of micro-oscillators for six different gas atmospheres and gap widths to a limiting boundary in-between 150 to 3500 μm. The LEM is in good agreement with the experimental data of the first four bending modes and the electronic components exhibit a reasonable correlation to the physical properties of the measured gases.