激光预处理技术在内存计数物理失效分析中的应用

Yanlin Pan, Yuzhe Zhao, P. K. Tan, P. Khoo, P. Y. Yeo, Siong Luong TING, H. Tan, C. Chen
{"title":"激光预处理技术在内存计数物理失效分析中的应用","authors":"Yanlin Pan, Yuzhe Zhao, P. K. Tan, P. Khoo, P. Y. Yeo, Siong Luong TING, H. Tan, C. Chen","doi":"10.1109/IPFA47161.2019.8984871","DOIUrl":null,"url":null,"abstract":"With continuous technology scaling of semiconductor devices, conventional physical failure analysis (PFA) techniques becomes more and more challenging with the increased number of transistors and layer stacks. This paper presents a new memory bit-counting method in PFA by employing laser deprocessing technique (LDT). This LDT assisted new method is more cost-effective and efficient in the PFA on memory bit-counting in terms of shortening the total FA cycle time and lowering the requirements for the experimental equipment, which leads to the increase of PFA throughput in memory devices especially for high technology nodes.","PeriodicalId":169775,"journal":{"name":"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Application of Laser Deprocessing Technique in Physical Failure Analysis on Memory Bit-counting\",\"authors\":\"Yanlin Pan, Yuzhe Zhao, P. K. Tan, P. Khoo, P. Y. Yeo, Siong Luong TING, H. Tan, C. Chen\",\"doi\":\"10.1109/IPFA47161.2019.8984871\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"With continuous technology scaling of semiconductor devices, conventional physical failure analysis (PFA) techniques becomes more and more challenging with the increased number of transistors and layer stacks. This paper presents a new memory bit-counting method in PFA by employing laser deprocessing technique (LDT). This LDT assisted new method is more cost-effective and efficient in the PFA on memory bit-counting in terms of shortening the total FA cycle time and lowering the requirements for the experimental equipment, which leads to the increase of PFA throughput in memory devices especially for high technology nodes.\",\"PeriodicalId\":169775,\"journal\":{\"name\":\"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA47161.2019.8984871\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA47161.2019.8984871","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

随着半导体器件技术规模的不断扩大,传统的物理失效分析(PFA)技术随着晶体管和层堆叠数量的增加而变得越来越具有挑战性。提出了一种基于激光去处理技术(LDT)的PFA存储位计数新方法。这种LDT辅助的PFA方法在内存位计数的PFA中具有更高的成本效益和效率,缩短了总FA周期时间,降低了对实验设备的要求,从而提高了存储器件特别是高技术节点的PFA吞吐量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of Laser Deprocessing Technique in Physical Failure Analysis on Memory Bit-counting
With continuous technology scaling of semiconductor devices, conventional physical failure analysis (PFA) techniques becomes more and more challenging with the increased number of transistors and layer stacks. This paper presents a new memory bit-counting method in PFA by employing laser deprocessing technique (LDT). This LDT assisted new method is more cost-effective and efficient in the PFA on memory bit-counting in terms of shortening the total FA cycle time and lowering the requirements for the experimental equipment, which leads to the increase of PFA throughput in memory devices especially for high technology nodes.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信