利用离散事件模拟协调晶圆厂关键利益相关者的运作管理

Georg Seidel, Ching Foong Lee, Ai Mei Kam, Boon-Ping Gan, Chew Wye Chan, A. Naumann, P. Preuss
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引用次数: 10

摘要

晶圆厂的运营会议包括在关键利益相关者(运营、维护、工程和计划部门)之间进行日常的行动项目协调。他们的工作职能相互冲突。要求维护部门进行预防性维护,以提高工具的可靠性。要求工程部对新产品和新工艺进行认证。这两种情况都会干扰生产批次的流程。计划部门必须确保产量增加。这可能会对整个晶圆厂的交货和产能产生短期影响。主要的挑战是达成一致的决策,例如PM的最佳时间或优化生产和开发批次的调度优先级,以确保按时交付,同时最大限度地提高产能和工具利用率。在本文中,我们讨论了一个基于7天模拟的预测的相关建模问题,提供了在制品的传入,移动和利用在工作中心水平的预测。模拟预报的准确率始终保持在90%以上。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Harmonizing operations management of key stakeholders in wafer fab using discrete event simulation
Operations meeting in a wafer fab involves daily alignment of action items among key stakeholders: operations, maintenance, engineering and planning department. They have conflicting job functions. The maintenance department is required to conduct preventive maintenance (PM) to improve tools' reliability The engineering department is required to qualify new products and processes. Both cases interfere with the flow of production lots. The planning department must ensure production ramp up. This can have a short term impact on overall fab delivery and capacity. The primary challenge is to reach aligned decisions e.g. the best timing for PM or optimizing dispatch prioritization of production and development lots to ensure on-time delivery while maximizing capacity and tool utilization. In this paper we discuss the associated modelling issues of a 7-day simulation-based forecast, providing forecast of incoming WIP, moves and utilization at work center level. The simulation forecast consistently achieved an accuracy above 90%.
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