N. D. Md Sin, A. Abdul Aziz, S. Ahmad, M. Musa, M. H. Mamat, M. Rusop
{"title":"热处理后对射频磁控溅射制备ZnO薄膜性能的影响","authors":"N. D. Md Sin, A. Abdul Aziz, S. Ahmad, M. Musa, M. H. Mamat, M. Rusop","doi":"10.1109/SCORED.2012.6518617","DOIUrl":null,"url":null,"abstract":"The influence of post heat treatment on ZnO thin films prepared by RF magnetron sputtering was reported. The effect of ZnO thin films post heat treatment were varies from 300°C to 550°C had been investigated. The thin films were examined using two point probe current-voltage (I-V) measurement (Keithley 2400), UV-Vis-NIR spectrophotometer, field emission scanning electron microscopy (FESEM) (JEOL JSM 7600F). The current-voltage (I-V) measurements indicated that the conductivity of post heat treatment temperature of 500°C give the optimum conductivity. All films exhibited high UV absorption (300~380nm) properties and had low absorbance in visible and near infrared (IR) (380~1200nm) region that obtained from UV-Vis-NIR spectrophotometer measurement. The observed image from FESEM shows an increase of the nanocolumnar size, as the post heat treatment increases.","PeriodicalId":299947,"journal":{"name":"2012 IEEE Student Conference on Research and Development (SCOReD)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of post heat treatment to the properties of ZnO thin film prepared by RF magnetron sputtering\",\"authors\":\"N. D. Md Sin, A. Abdul Aziz, S. Ahmad, M. Musa, M. H. Mamat, M. Rusop\",\"doi\":\"10.1109/SCORED.2012.6518617\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The influence of post heat treatment on ZnO thin films prepared by RF magnetron sputtering was reported. The effect of ZnO thin films post heat treatment were varies from 300°C to 550°C had been investigated. The thin films were examined using two point probe current-voltage (I-V) measurement (Keithley 2400), UV-Vis-NIR spectrophotometer, field emission scanning electron microscopy (FESEM) (JEOL JSM 7600F). The current-voltage (I-V) measurements indicated that the conductivity of post heat treatment temperature of 500°C give the optimum conductivity. All films exhibited high UV absorption (300~380nm) properties and had low absorbance in visible and near infrared (IR) (380~1200nm) region that obtained from UV-Vis-NIR spectrophotometer measurement. The observed image from FESEM shows an increase of the nanocolumnar size, as the post heat treatment increases.\",\"PeriodicalId\":299947,\"journal\":{\"name\":\"2012 IEEE Student Conference on Research and Development (SCOReD)\",\"volume\":\"32 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE Student Conference on Research and Development (SCOReD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SCORED.2012.6518617\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE Student Conference on Research and Development (SCOReD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SCORED.2012.6518617","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of post heat treatment to the properties of ZnO thin film prepared by RF magnetron sputtering
The influence of post heat treatment on ZnO thin films prepared by RF magnetron sputtering was reported. The effect of ZnO thin films post heat treatment were varies from 300°C to 550°C had been investigated. The thin films were examined using two point probe current-voltage (I-V) measurement (Keithley 2400), UV-Vis-NIR spectrophotometer, field emission scanning electron microscopy (FESEM) (JEOL JSM 7600F). The current-voltage (I-V) measurements indicated that the conductivity of post heat treatment temperature of 500°C give the optimum conductivity. All films exhibited high UV absorption (300~380nm) properties and had low absorbance in visible and near infrared (IR) (380~1200nm) region that obtained from UV-Vis-NIR spectrophotometer measurement. The observed image from FESEM shows an increase of the nanocolumnar size, as the post heat treatment increases.
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