在硅上制造的RF-MEMS滤波器:本体声波技术的关键事实

2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers. Pub Date : 2003-04-11 DOI:10.1109/SMIC.2003.1196694

R. Aigner

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引用次数: 14

摘要

综述了目前最先进的体声波(BAW)器件的工作原理和性能。讨论了射频滤波器在手机应用中的重要性，并强调了硅基技术的优势。简要回顾了baw制造面临的挑战。描述了最重要的性能参数，如谐振器带宽和q值，以及它们对处理和设计的依赖关系。讨论了单片集成“片上系统”与射频集成电路或混合集成“包中系统”是否更有意义。最先进的BAW过滤器在生产和加速状态的例子。

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RF-MEMS filters manufactured on silicon: key facts about bulk-acoustic-wave technology

The working principle and performance of state-of-the-art Bulk-Acoustic-Wave (BAW) devices is reviewed. The importance for RF-filters in mobile phone applications is discussed and the benefit of silicon-based technologies highlighted. Challenges in manufacturing of BAWs are briefly reviewed. The most important performance parameters such as resonator bandwidth and Q-values - and their dependency on processing and design are described. Whether monolithic integration "System-On-Chip" together with RFICs or hybrid integration "System-In-Package" makes more sense is discussed. Examples of state-of-the-art in BAW filters in production and ramp-up status are presented.

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2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers.

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