高速0.25μm SiGe BiCMOS中的硅光子前端集成

2008 5th IEEE International Conference on Group IV Photonics Pub Date : 2008-10-07 DOI:10.1109/GROUP4.2008.4638204

L. Zimmermann, K. Voigt, G. Winzer, D. Wolansky, S. Geisler, H. Richter, B. Tillack

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引用次数: 5

摘要

考虑了在合格的0.25 μ SiGe BiCMOS技术线的前端实现光子功能的模块化集成。介绍了电子和波导测试结构的初步测量结果。

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Silicon photonics front-end integration in high-speed 0.25μm SiGe BiCMOS

Modular integration of photonic functionality in the front-end of line of a qualified 0.25 mum SiGe BiCMOS technology is considered. First measurements of electronic & waveguide test structures are presented.

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2008 5th IEEE International Conference on Group IV Photonics

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