铝-聚酯复合材料精细花纹Fpc的制备

I. Kohara, M. Takaishi, Y. Yarnarnoto, Hiroya Ito, K. Kondo
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摘要

与Cu相反,对于电离电位大于氢的金属,蚀刻剂与金属表面之间的电位差产生氢,金属溶解。这种腐蚀细胞形成的蚀刻也适用于酸性条件,如在HC1或浓H3P04中,也适用于碱性条件下的NaOH水溶液。这一机制解释了实现Al精细图案蚀刻的困难。图中总结了所使用的Al/PET的成分。化学性质稳定的薄氧化铝层覆盖在铝表面。氧化层的溶解速度比腐蚀细胞形成的金属铝的溶解速度慢得多。因此,a123层的两侧抵抗蚀刻,而金属Al层反应迅速溶解。这导致了巨大的下切(图2)。与其它金属共存时,Al金属晶格的方向、其微扰或残余应变引起电位差。在蚀刻反应中出现电位不均匀性。不同金属离子对FeC13蚀刻体系的影响,以及污染微量Fe、Cu、Si等不纯金属对蚀刻速率的影响。这种不纯的金属或溶解或沉积。当附着在铝表面时,由于电位差较大,铝的溶解速度加快。生成的H2气泡附着在Al层上,停止了附着区域的蚀刻。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Manufacturing A Fine Pattern Fpc Of Aluminum-polyester Composite
In contrast to Cu, for metals with larger ionization potential than that of hydrogen, the potential difference between etchant and the metal surface generate hydrogen and the metal dissolves. The etching by such a corrosion cell formation is also true for the acidic condition such as in HC1 or in concentrated H3P04 also under basic conditions in aqueous NaOH. The mechanism explains the difficulty to achieve the fine pattern etching of Al. Compositions of the Al/PET used are summarized in Figurel. Chemically stable thin aluminum oxide layer covers the Al surface. The dissolution rate of the oxidized layer is much slower than the metallic Al dissolution rate by the corrosive cell formation. Therefore the two sides of the A 1 2 0 3 layer resists the etching while the metallic Al layer reacts to dissolve quickly. This results in the great undercut (Figure2). CO-existing other metals, the direction of Al metal crystal lattice, its perturbation or residual strain cause the potential differences. The potential in-homogeneity occurs in the etching reaction. The effects of different metal ions not only in the case of FeC13 etching system but also with contaminated trace amounts of impure metals such as Fe, Cu and Si cause the difference in etching rate. This impure metal suffers dissolution and deposition alternatively. When attachment to .the Al surface, the Al-dissolution rate becomes greater because of the larger potential difference. The attachment of the generated H2 bubble on the Al layer stops the etching on the attached area.
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