内置硅微透镜的低功耗集成激光多普勒血流仪

Y. Kimura, A. Onoe, E. Higurashi, R. Sawada
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引用次数: 13

摘要

提出了一种集成式激光多普勒血流计的结构,该结构由硅腔和光电二极管组成,腔内有激光二极管。由会聚微透镜形成的硅盖也起到封装的作用。这种结构降低了传感器的光功率损耗率,从而显著降低了功耗。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens
We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.
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