内置硅微透镜的低功耗集成激光多普勒血流仪

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607804

Y. Kimura, A. Onoe, E. Higurashi, R. Sawada

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引用次数: 13

摘要

提出了一种集成式激光多普勒血流计的结构，该结构由硅腔和光电二极管组成，腔内有激光二极管。由会聚微透镜形成的硅盖也起到封装的作用。这种结构降低了传感器的光功率损耗率，从而显著降低了功耗。

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Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens

We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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