红外波段三维光子晶体的微操作研究

K. Aoki, Hidetoshi Miyazaki
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引用次数: 0

摘要

我们展示了一种新的制造技术,有可能实现复杂的三维光子器件。利用微操作技术将二维光子板进行叠加制备光子晶体。利用在光子板框架内制备的基准孔和聚苯乙烯微球作为挡板来保持精确的周期性。利用该方法,可制作两期(8层)的木桩结构,周期为1.4 /spl mu/m,桩宽0.37 /spl mu/m。利用该技术,无论光子晶体结构多么复杂,都能自动实现晶格的精确对准。因此,该技术适用于复杂结构的制造。根据其光学性质对制备的晶体进行了评价。在透射率的测量中,在假设波长区域(3-5 /spl mu/m)出现了一个倾角,其强度随着层数的增加而增强。在反射率的测量中,在同一波长处出现了一个峰值。这些结果表明,所获得的晶体足够细,可以在红外波长区域形成光学阻带。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of three-dimensional photonic crystals in the infrared wavelength region by micromanipulation method
We demonstrate a novel fabrication technique that has the potential to realize intricate three-dimensional photonic devices. Photonic crystals were fabricated by stacking two-dimensional photonic plates by micromanipulation. Accurate periodicity was maintained by using fiducial holes, which were prepared in the frame of photonic plates, and polystyrene microspheres as stoppers. With this method, up to two periods (eight layers) of woodpile structures with a periodicity of 1.4 /spl mu/m and a pile width of 0.37 /spl mu/m were fabricated. With this technique, the accurate alignment of lattice can be achieved automatically regardless of how complicated the photonic crystal structure is. Thus, this technique is suitable for fabricating complex structures. The fabricated crystals were evaluated based on their optical properties. In the measurements of transmittance, a dip appeared in the supposed wavelength region (3-5 /spl mu/m), and its intensity become stronger as the number of layers increased. In the measurements of reflectance, a peak appeared at the same wavelength. These results indicate that the obtained crystals are fine enough for developing an optical stopband in infrared wavelength region.
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