设备维护后自动阈值管理

2018 International Symposium on Semiconductor Manufacturing (ISSM) Pub Date : 2018-12-01 DOI:10.1109/ISSM.2018.8651140

H. Shinozaki, Tomonori Tanaka

{"title":"设备维护后自动阈值管理","authors":"H. Shinozaki, Tomonori Tanaka","doi":"10.1109/ISSM.2018.8651140","DOIUrl":null,"url":null,"abstract":"In management of the FDC (Fault Detection and Classification) alarm threshold, sensor drift after maintenance has been big and major challenge. Especially in etching area where has relatively short maintenance (cleaning) cycle and many chambers and recipes (our fab is high-mix low-volume type.). We developed auto threshold re-calculate system practical and easily introduce. Using the system we successfully reduce needed cost of re-calculate the threshold and loss of manufacturing time.","PeriodicalId":262428,"journal":{"name":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"67 3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Auto Threshold Management after Equipment Maintenance\",\"authors\":\"H. Shinozaki, Tomonori Tanaka\",\"doi\":\"10.1109/ISSM.2018.8651140\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In management of the FDC (Fault Detection and Classification) alarm threshold, sensor drift after maintenance has been big and major challenge. Especially in etching area where has relatively short maintenance (cleaning) cycle and many chambers and recipes (our fab is high-mix low-volume type.). We developed auto threshold re-calculate system practical and easily introduce. Using the system we successfully reduce needed cost of re-calculate the threshold and loss of manufacturing time.\",\"PeriodicalId\":262428,\"journal\":{\"name\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"volume\":\"67 3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2018.8651140\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2018.8651140","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

在故障检测与分类(FDC)告警阈值管理中，维护后的传感器漂移一直是一个巨大而重大的挑战。特别是在蚀刻领域，维护(清洁)周期相对较短，腔室和配方较多(我们的晶圆厂是高混合小批量型)。我们开发的自动阈值重新计算系统实用且易于介绍。利用该系统，成功地降低了重新计算阈值所需的成本和制造时间损失。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Auto Threshold Management after Equipment Maintenance

In management of the FDC (Fault Detection and Classification) alarm threshold, sensor drift after maintenance has been big and major challenge. Especially in etching area where has relatively short maintenance (cleaning) cycle and many chambers and recipes (our fab is high-mix low-volume type.). We developed auto threshold re-calculate system practical and easily introduce. Using the system we successfully reduce needed cost of re-calculate the threshold and loss of manufacturing time.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2018 International Symposium on Semiconductor Manufacturing (ISSM)

自引率

0.00%

发文量