基于声学技术的多晶硅片应力诊断

Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002. Pub Date : 2002-05-19 DOI:10.1109/PVSC.2002.1190526

A. Belyaev, S. Lulu, I. Tarasov, S. Ostapenko, J. Kalejs

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引用次数: 0

摘要

作为太阳能电池衬底的硅晶体在生长过程中会产生残余应力。这种应力影响晶圆加工成电池和组件的成品率。我们在这里报道了共振声学方法的应用，该方法以前用于测量CZ硅片中的应力，以表征多晶EFG硅带片。

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Stress diagnostics in multicrystalline silicon wafers using an acoustic technique

Residual stress is generated in silicon crystals during growth of material for use as substrates for solar cells. This stress affects yield in processing the wafers into cells and modules. We report here on the application of a resonance acoustic method, used previously to measure stress in CZ silicon wafers, to characterize multicrystalline EFG silicon ribbon wafers.

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Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002.

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