应用静电喷涂沉积(ESD)制备厚PZT薄膜用于微系统技术

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984159

Jian Lu, J. Chu, Wenhao Huang, Zhimin Ping

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引用次数: 1

摘要

PZT薄膜作为一种极具应用价值的功能材料，在微传感器和微致动器等微系统中具有广泛的应用前景。本文介绍了一种以溶胶-凝胶溶液为前驱体制备PZT厚膜的新沉积方法——静电喷涂沉积(ESD)。它具有薄膜生长速度快、薄膜成分易于控制、设置简单、成本低等优点。结果表明，这是一种具有较好压电性能的厚PZT薄膜制备方法。

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Preparation of thick PZT film by electrostatic spray deposition (ESD) for the application in micro-system technology

As one of the most useful functional materials, PZT films are of great interest in micro-systems for the fabrication of microsensors and microactuators. In this paper, we introduce a new deposition method for thick PZT film preparation, named "electrostatic spray deposition (ESD)", using sol-gel solution as precursors. It offers the advantages of high film growth rate, easy control of film compositions, simple setup and low cost. Our results proved that it is a promising method for thick PZT film preparation with relatively good piezoelectric properties.

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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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