改进了MOVPE生长的gainasn基长波激光器的光致发光和激光性能

E. Gouardes, F. Alexandre, O. Gauthier-Lafaye, A. Vuong-Becaert, V. Colson, B. Thedrez
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引用次数: 0

摘要

近年来,在GaAs衬底上生长的GaInAsP材料作为成熟的GaInAsP/InP半导体系统的替代材料系统受到了广泛的关注,特别是对于1.3 /spl mu/m的发射。然而,由于N的掺入,GaInAsN量子阱(QW)的光致发光特性以及基于GaInAsN的激光器的激光阈值都会发生特定的退化。本文详细研究了以二甲基肼(DMHy)为氮前驱体的MOVPE生长GaInAsN的生长参数。我们已经确定,远离标准参数的优化生长条件可以导致PL和激光特性的强烈改善。因此,结合低生长温度和生长速率的低压MOVPE工艺,以及选择特定的低裂解温度的v族和III族前驱体,如DMHy, TBAs和TEGa,对于实现适合激光器件的GaInAsN材料至关重要。通过这种方式,我们实现了1.26 /spl mu/m的激光,阈值电流密度低至540A/cm/sup 2/。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improved photoluminescence and lasing performances of MOVPE grown GaInAsN-based long wavelength lasers
GaInAsN material grown on GaAs substrate have received a large amount of interest for several years as an alternative material system to the well matured GaInAsP/InP semiconductor system, especially for 1.3 /spl mu/m emission. However, a specific degradation of the photoluminescence properties of GaInAsN quantum wells (QW), and consequently of the lasing threshold of GaInAsN-based lasers, occurs due to the N incorporation. In this paper, we have investigated in detail the growth parameters of GaInAsN grown by MOVPE using dimethylhydrazine (DMHy) as nitrogen precursor. We have established that optimized growth conditions further away from standard parameters can lead to a strong improvement of both PL and lasing characteristics. Thus, a low-pressure MOVPE process combined with low growth temperature and growth rate, as well as the choice of specific low cracking temperature group-V and III precursors such as DMHy, TBAs and TEGa are essential to achieve GaInAsN material suitable for laser devices. By this way, we have achieved lasing at 1.26 /spl mu/m with a threshold current density as low as 540A/cm/sup 2/.
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