300mm FAB的及时AMHS交付

2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Pub Date : 2004-09-09 DOI:10.1109/SMTW.2004.1393706

J. Chang, Yung Cheng

{"title":"300mm FAB的及时AMHS交付","authors":"J. Chang, Yung Cheng","doi":"10.1109/SMTW.2004.1393706","DOIUrl":null,"url":null,"abstract":"When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.","PeriodicalId":369092,"journal":{"name":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Just-in-time AMHS delivery for 300 mm FAB\",\"authors\":\"J. Chang, Yung Cheng\",\"doi\":\"10.1109/SMTW.2004.1393706\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.\",\"PeriodicalId\":369092,\"journal\":{\"name\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMTW.2004.1393706\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMTW.2004.1393706","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

当投资高成本建立300毫米FAB运输自动化时(根据ITRS 2003，占300毫米FAB总资本的3%)，我们总是审查这项巨大投资的性能和KPl，以确保投资可以从300毫米FAB自动化操作生产率中获得足够的ROI(投资回报)。当我们接近ITRS的AMHS矩阵时，平均FAB宽运输时间应为8分钟;最大FAB宽FOUP运输时间应为15分钟。我们发现，与昂贵的AMHS投资相比，即时集成系统设计可以轻松获得300毫米以上的全自动化生产率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Just-in-time AMHS delivery for 300 mm FAB

When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.

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2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)

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