sb-异质结构二极管的低噪声检测优化

H. Moyer, T. Hsu, R. Bowen, Y. Boegeman, P. Deelman, S. Thomas, A. Hunter, J. Schulman
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引用次数: 1

摘要

目前基于平方律检测器二极管的毫米波成像相机需要一个射频低噪声放大器(LNA)来将信号提升到检测器噪声底限以上。由InAs和AlGaSb外延层制成的sb异质结构二极管在w波段显示出非常高的零偏灵敏度,但所研究的器件并未针对低噪声进行优化[1-3]。与常用的偏置肖特基二极管检测器相比,零偏置器件具有重要的先验优势,因为去除偏置可消除1/f噪声,并且在不需要预放大的情况下提供超低噪声性能的潜力。剩余的噪声主要是约翰逊噪声,Sv =4kTRj(每Hz),其中RJ是结电阻。一个关键的优点是噪声等效功率(NEP),这是对最小可检测功率的测量,由SV I2/S给出,其中S是灵敏度,单位是伏特每瓦。为了降低噪声,RJ可以从先前二极管的- 10okq值减小。基本二极管有源区包含高掺杂的n型InAs、AlSb势垒、未掺杂的AlGaSb层,以及高掺杂的GaSb (p)与InAs (n)的隧道结[1-3]。这里被改变的关键层是AlSb层。它控制通过器件的总电流,从而控制结电阻。我们已经将其从之前的32-39A减薄到15 - 20a,以降低结电阻。具有15iA AlSb势垒的典型2x2 [m2二极管的I-V曲线如图1所示。一个多项式拟合的重要图形的优点y, I-V曲率除以斜率[4],是23V'。这比较厚的AlSb屏障的~40V-1曲率要小一些。具有20A AlSb的二极管产生了27V-'的中间曲率,说明了当屏障变薄时接近欧姆行为的预期趋势。使用测量到40 GHz的参数提取标准等效电路模型。图2显示了15A和20A势垒厚度二极管的提取结果表。由于外延、加工公差和测量不确定度的变化,晶圆上的值相差约10-15%。在微波办公软件[5]中,将这些值与多项式一起用于用户自定义的非线性模型中,结果如图3所示。该结果与图4的实测数据相似。为此,二极管被放置在具有5密耳氧化铝电路的外壳中,并调谐到最佳灵敏度。在这两种情况下,最大灵敏度接近2500 V/W。在36 GHz增加了一条开放的X/4线,将射频信号反射回二极管,以抵消直流输出侧电容损耗的影响。由于线路作为窄带带阻滤波器,电路的带宽降低。相关测量的二极管低频噪声如图5所示。最合适的是约翰逊噪声功率相当于一个630Q电阻,相当接近结电阻加上串联电阻的-38Q。这表明在零偏条件下,噪声遵循预测的简单行为。使用此噪声功率和峰值测量灵敏度2700v /W的NEP方程产生1.2 pW/Hz。我们认为我们的r值可以大大降低,因为扫描电镜照片显示明显的削弱。这加上进一步缩小二极管面积和电容应导致NEP值远低于1 pW/Hz12。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimization of sb-heterostructure diode for low noise detection
Current millimeter wave imaging cameras based on square-law detector diodes require an RF low noise amplifier (LNA) to boost the signal above the detector noise floor. Sb-heterostructure diodes, fabricated from epitaxial layers of InAs and AlGaSb, have shown very high zero-biased sensitivities at W-band, but the devices studied were not optimized for low noise [1-3]. Zero-biased devices have an important a priori advantage over the commonly used biased Schottky diode detector because removing the bias eliminates 1/fnoise and provides the potential for ultra-low noise performance without the need for pre-amplification. The remaining noise is predominantly Johnson noise, Sv =4kTRj (per Hz), where RJ is the junction resistance. A key figure of merit is the Noise Equivalent Power (NEP), a measure of the minimum detectable power, given by SV"I2/S, where S is the sensitivity in volts per watt. To lower the noise, RJ can be decreased from the -1OKQ value of the previous diodes. The basic diode active region contains highly doped n-type InAs, an AlSb barrier, an un-doped AlGaSb layer, followed by a highly doped GaSb (p) to InAs (n) tunnel junction [1-3]. The key layer being altered here is the AlSb layer. It controls the overall current flow through the device and thus the junction resistance. We have thinned it from its previous values of 32-39A to 1 5-20A to lower the junction resistance. The I-V curve of a typical 2x2 [m2 diode with a 15iA AlSb barrier is shown in Fig. 1. A polynomial fit to the important figure of merit y, the I-V curvature divided by the slope [4], is found to be 23V'. This is somewhat less than the ~40V-1 curvature found with the thicker AlSb barriers. The diode with a 20A AlSb produced an intermediate curvature of 27V-', illustrating the expected trend of approaching ohmic behavior as the barrier is thinned. Sparameters measured to 40 GHz are used to extract a standard equivalent circuit model. Figure 2 shows a table ofthe extracted results for the diodes with 15A and 20A barrier thicknesses. The values differ by about 10-15% across a wafer due to variations in epitaxy, processing tolerances, and measurement uncertainties. These values, along with the polynomial, are utilized in a user defined non-linear model in Microwave Offi1ce [5] with the results being displayed in Fig. 3. This result is similar to the measured data in Fig. 4. for which the diode was placed in a housing with 5 mil alumina circuits and tuned for optimum sensitivity. In both cases, the maximum sensitivity is close to 2500 V/W. An open X/4 line at 36 GHz was added to reflect the RF signal back into the diode to offset the effects from capacitor loss on the DC output side. As the line acts as a narrowband bandstop filter, the bandwidth of the circuit was reduced. Associated measured low frequency noise of the diode is shown in Fig. 5. The best fit is to a Johnson noise power equivalent to that of a 630Q resistor, quite close to the junction resistance plus -38Q of series resistance. This shows that under the zero-bias condition the noise follows the simple behavior predicted. Using this noise power and the peak measured sensitivity of2700V/W in the equation for NEP yields 1.2 pW/Hz"2. We believe that our Rs values can be reduced considerably as SEM photographs revealed significant undercutting. This plus further shrinking the diode area and capacitance should lead to NEP values well under 1 pW/Hz12.
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