利用宽带光源的光学低相干干涉技术表征侧壁布拉格光栅

Chen Zhang, Xin Wang, C. Madsen
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摘要

在这项工作中,我们提出了在钛扩散铌酸锂(Ti:LiNbO3)通道波导上的硫系三硫化砷(As2S3)的侧壁布拉格光栅的制造和测量。采用传递矩阵法分析了侧壁光栅在中红外波段的时间响应和光谱响应。采用电子束光刻(EBL)、金属提升和后续反应离子刻蚀(RIE)工艺制备了波导侧壁布拉格光栅。测量中红外Ti:LiNbO3光波导的插入损耗为~2 dB,传播损耗为0.45 dB/cm。实验实现了一种能够表征中红外侧壁光栅器件的光学低相干干涉仪的结构,并给出了光纤布拉格光栅的初步结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of sidewall Bragg gratings using optical low-coherence interferometry with a broadband source
In this work, we present fabrication and measurement of sidewall Bragg gratings in chalcogenide arsenic tri-sulfide (As2S3) on titanium-diffused lithium niobate (Ti:LiNbO3) channel waveguides. The transfer matrix method was used to analyze the temporal and spectral response of the sidewall gratings in the mid-infrared. The waveguide sidewall Bragg gratings were fabricated by electron-beam lithography (EBL), metal liftoff and subsequent reactive-ion etching (RIE). Insertion loss of the mid-infrared Ti:LiNbO3 optical waveguides were measured at ~2 dB and the propagation loss was estimated to be 0.45 dB/cm. Configuration of an optical low-coherence interferometer that is capable of characterizing the mid-infrared sidewall grating-based devices was experimentally implemented and preliminary results from fiber Bragg gratings are presented.
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