利用预退火技术提高热波信号的稳定性

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Pub Date : 1900-01-01 DOI:10.1109/IIT.2002.1257986

M. Harada, M. Sano, H. Izutani

{"title":"利用预退火技术提高热波信号的稳定性","authors":"M. Harada, M. Sano, H. Izutani","doi":"10.1109/IIT.2002.1257986","DOIUrl":null,"url":null,"abstract":"In this study, we investigated causes of fluctuation of Therma-Wave(TW) signals in order to improve the stability of TW signal measurement. In case of heavy ion implantation, several causes were found, and pre-annealing before implantation showed the most effective contribution to improve the fluctuation. It is from 2.13% to 0.41% (1σ) in case of In+ implantation. This paper presents innovative improvement of the TW signal stability by the pre-annealing and other methods.","PeriodicalId":305062,"journal":{"name":"Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Stability improvement of Therma-Wave signal by pre-annealing\",\"authors\":\"M. Harada, M. Sano, H. Izutani\",\"doi\":\"10.1109/IIT.2002.1257986\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, we investigated causes of fluctuation of Therma-Wave(TW) signals in order to improve the stability of TW signal measurement. In case of heavy ion implantation, several causes were found, and pre-annealing before implantation showed the most effective contribution to improve the fluctuation. It is from 2.13% to 0.41% (1σ) in case of In+ implantation. This paper presents innovative improvement of the TW signal stability by the pre-annealing and other methods.\",\"PeriodicalId\":305062,\"journal\":{\"name\":\"Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on\",\"volume\":\"67 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IIT.2002.1257986\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIT.2002.1257986","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文研究了热波信号波动的原因，以提高热波信号测量的稳定性。在重离子注入的情况下，发现了多种原因，其中注入前的预退火对改善波动的贡献最大。in +注入时，δ δ为2.13% ~ 0.41% (1σ)。本文采用预退火等方法创新性地改善了TW信号的稳定性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Stability improvement of Therma-Wave signal by pre-annealing

In this study, we investigated causes of fluctuation of Therma-Wave(TW) signals in order to improve the stability of TW signal measurement. In case of heavy ion implantation, several causes were found, and pre-annealing before implantation showed the most effective contribution to improve the fluctuation. It is from 2.13% to 0.41% (1σ) in case of In+ implantation. This paper presents innovative improvement of the TW signal stability by the pre-annealing and other methods.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on

自引率

0.00%

发文量