用于MEMS驱动的自旋交叉材料:薄膜集成和表征

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI:10.1109/TRANSDUCERS.2017.7994294

María D. Manrique-Juárez, S. Rat, L. Mazenq, F. Mathieu, I. Séguy, T. Leïchlé, L. Nicu, L. Salmon, G. Molnár, A. Bousseksou

{"title":"用于MEMS驱动的自旋交叉材料:薄膜集成和表征","authors":"María D. Manrique-Juárez, S. Rat, L. Mazenq, F. Mathieu, I. Séguy, T. Leïchlé, L. Nicu, L. Salmon, G. Molnár, A. Bousseksou","doi":"10.1109/TRANSDUCERS.2017.7994294","DOIUrl":null,"url":null,"abstract":"This work describes the integration of molecular spin crossover (SCO) compound [Fe(H<inf>2</inf>B(pz)<inf>2</inf>)<inf>2</inf>(phen)] 1 (H2B(pz)<inf>2</inf> = dihydrobis(pyrazolyl)borate, phen = 1,10-phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Spin crossover materials for MEMS actuation: Film integration and characterization\",\"authors\":\"María D. Manrique-Juárez, S. Rat, L. Mazenq, F. Mathieu, I. Séguy, T. Leïchlé, L. Nicu, L. Salmon, G. Molnár, A. Bousseksou\",\"doi\":\"10.1109/TRANSDUCERS.2017.7994294\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work describes the integration of molecular spin crossover (SCO) compound [Fe(H<inf>2</inf>B(pz)<inf>2</inf>)<inf>2</inf>(phen)] 1 (H2B(pz)<inf>2</inf> = dihydrobis(pyrazolyl)borate, phen = 1,10-phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.\",\"PeriodicalId\":174774,\"journal\":{\"name\":\"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"volume\":\"80 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-06-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2017.7994294\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2017.7994294","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本工作描述了分子自旋交叉(SCO)化合物[Fe(H2B(pz)2)2(phen)] 1 (H2B(pz)2 =二氢双(吡唑基)硼酸盐，phen = 1,10-菲苯啉)集成到硅MEMS中，目的是确定SCO薄膜的机械性能。采用1沉积前后实验共振频率的分析方法，提取薄膜沉积引起的弹性模量E和残余应力σ，得到E = 6.9±0.1 GPa和σ = 74.8 MPa。由于预期的自旋跃迁，还预测了额外的机械参数。这些结果为SCO材料的集成提供了一步，用于未来在MEMS/NEMS器件中作为执行器的应用。

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Spin crossover materials for MEMS actuation: Film integration and characterization

This work describes the integration of molecular spin crossover (SCO) compound [Fe(H2B(pz)2)2(phen)] 1 (H2B(pz)2 = dihydrobis(pyrazolyl)borate, phen = 1,10-phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.

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2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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