用于200 GHz以上功率放大器的铜和铝SiGe BEOL选项的比较

2022 24th International Microwave and Radar Conference (MIKON) Pub Date : 2022-09-12 DOI:10.23919/mikon54314.2022.9924789

Joachim Hebeler, A. Ulusoy, T. Zwick

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引用次数: 4

摘要

本文研究了在$f_{t}/ $f_{\max}$为350ghz /450GHz的130nmSiGe工艺中，用于200ghz以上功率放大器的铜BEOL选项的可能好处。研究了金属化的差异，并根据功率放大器的设计量化了性能上的优点和缺点。使用各自的技术构建了两个功率放大器，测量和讨论了不同BEOL选项导致的差异。

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Comparison of a Copper and Aluminium SiGe BEOL option for power amplifiers above 200 GHz

This paper investigates the possible benefits of a copper BEOL option for power amplifiers above 200 GHz in a 130nmSiGe process featuring a $f_{t}/f_{\max}$ of 350 GHz/450GHz. The differences in the metallizations are investigated, and the performance benefits and shortcomings are quantified in light of power amplifier design. Two power amplifiers are built using the respective technologies, measured and discussed concerning their differences resulting from the different BEOL options.

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2022 24th International Microwave and Radar Conference (MIKON)

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