Experimental demonstration of a nanoelectromechanical switch-based logic library including sequential and combinational gates

We present the implementation and experimental verification of the first complete digital logic library based on amorphous carbon (a-C)-coated curved-cantilever nanoelectromechanical (NEM) switch technology. Experimental results for sequential gates - latches and edge-triggered D flip-flops (DFF) - and combinational circuits (NAND, AND) are reported for the first time. The capability of the fabricated NEM switch device to store and maintain charge on internal parasitic capacitances during the off-state is confirmed through measurements of dynamic sequential cells. This complete logic library paves the road towards the development of NEM switch-based microprocessors for ultra-low power logic applications.