{"title":"多晶硅熔合的物理学和可靠性","authors":"A. Ito, E. W. George, R. Lowry, H. A. Swasey","doi":"10.1109/IRPS.1984.362059","DOIUrl":null,"url":null,"abstract":"This paper is presented to further the understanding of the physics of programming polysilicon fuses. One and two dimensional models have been developed to understand the fusing event and predict the fusing time and power relationship. The predicted fusibility (fusing time and power dependence) is shown to be in good agreement with the experimental data.","PeriodicalId":326004,"journal":{"name":"22nd International Reliability Physics Symposium","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1984-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Physics and Reliability of Fusing Polysilicon\",\"authors\":\"A. Ito, E. W. George, R. Lowry, H. A. Swasey\",\"doi\":\"10.1109/IRPS.1984.362059\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper is presented to further the understanding of the physics of programming polysilicon fuses. One and two dimensional models have been developed to understand the fusing event and predict the fusing time and power relationship. The predicted fusibility (fusing time and power dependence) is shown to be in good agreement with the experimental data.\",\"PeriodicalId\":326004,\"journal\":{\"name\":\"22nd International Reliability Physics Symposium\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1984-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"22nd International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1984.362059\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"22nd International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1984.362059","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper is presented to further the understanding of the physics of programming polysilicon fuses. One and two dimensional models have been developed to understand the fusing event and predict the fusing time and power relationship. The predicted fusibility (fusing time and power dependence) is shown to be in good agreement with the experimental data.
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