带有磁性薄膜的无线微型机器

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI:10.1109/MHS.2003.1249907

A. Yamazaki, M. Sendoh, K. Ishiyama, K. Arai, R. Kato, M. Nakano, H. Fukunaga

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引用次数: 2

摘要

由于磁性微型机械是由磁场驱动的，因此不需要电源线，不需要电池，也不需要机身上的控制系统。我们制作了螺旋型微机(外径;0.14 mm，长度;1.0 mm)用钨丝(/spl φ / 20 /spl mu/m)。采用PLD方法在螺旋机上沉积钕铁硼薄膜磁体。在实验中，无线微机器以0.2 /spl sim/ 1.6 mm/s的速度游动。结果表明，螺旋形状适合于小型游泳机。

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Wireless micro-machine with magnetic thin film

As the magnetic micro-machines are driven by a magnetic field, they require no power supply cables, no batteries, and no controlling systems on the machine body. We fabricated the spiral-type micro-machine (outer diameter; 0.14 mm, length; 1.0 mm) by a tungsten wire (/spl Phi/ 20 /spl mu/m). NdFeB film magnet was deposited on the spiral-machine by the PLD method. In the experiment, the wireless micro-machine swam at the speed of 0.2 /spl sim/ 1.6 mm/s. This result indicated that the spiral shape was suitable for miniature swimming machine.

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MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)

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