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清华大学MEMS的发展

1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) Pub Date : 1998-10-21 DOI:10.1109/ICSICT.1998.786495
Liu Litian, L. Zhijian
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摘要

本文介绍了清华大学微电子研究所MEMS的发展情况。介绍了几种MEMS器件:智能传感器、微电机、微泵和麦克风。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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MEMS developments in Tsinghua University
This article introduces MEMS development in the Institute of Microelectronic at Tsinghua University. Several MEMS devices: smart sensors, micromotors, micropump and microphone are described.
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1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)
1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)
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