Improvement of optical properties and radiation resistance of optical coatings based on Nb2O5 and Ta2O5

This investigation was aimed at optimization of optical properties, stability and radiation resistance of optical coatings deposited using the standard vacuum coating plant equipped with the ion source for ion assisted deposition. There are some reports showing that porous dielectric coatings are more resistant to intense laser radiation, however they have smaller environmental stability than denser coatings, which are more sensitive to laser radiation. The influence of important technological parameters (deposition rate, substrate temperature, energy of ions) on optical properties and radiation resistance of high reflection dielectric coatings based on Nb2O5/SiO2 and Ta2O5/SiO2 in VIS spectral region is presented.