CVD石墨烯上金属触点的系统比较

2015 45th European Solid State Device Research Conference (ESSDERC) Pub Date : 2015-11-12 DOI:10.1109/ESSDERC.2015.7324744

A. Gahoi, V. Passi, S. Kataria, S. Wagner, A. Bablich, M. Lemme

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引用次数: 13

摘要

对石墨烯形成高质量欧姆接触进行了实验研究。研究了铂/金(Pt/Au)、镍/金(Ni/Au)、钯(Pd)、镍和金与单层化学气相沉积石墨烯的金属接触。实验数据表明，纯Au和Ni/Au提供了高重复性的低电阻欧姆接触。本文的研究结果表明，潜在的接触金属适用于高频电子器件。

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Systematic comparison of metal contacts on CVD graphene

An experimental study was conducted for forming high quality ohmic contacts to graphene. Metal contacts of platinum/gold (Pt/Au), nickel/gold (Ni/Au), palladium (Pd), Ni, and Au to monolayer chemical vapor deposited graphene were studied. The experimental data reveal that pure Au and Ni/Au provide highly reproducible low resistance ohmic contacts. The results presented in this work indicate potential contact metals suitable for high frequency electronic devices.

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来源期刊

2015 45th European Solid State Device Research Conference (ESSDERC)

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