聚合物退火过程中电荷分布的演化

G. Sessler, G. Yang
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引用次数: 9

摘要

在厚度为25 /spl mu/m的聚氟乙烯烯(FEP)和聚酰亚胺(PI)聚合物薄膜上带电的单能电子束范围小于样品厚度。然后,用激光诱导压力脉冲(LIPP)法测量了在120/spl℃退火温度下,厚度方向的电荷分布及其随时间的变化。用电子束辐照过程中的电荷积累和退火过程中的电荷输运模型对实验数据进行了分析。该模型考虑了电荷沉积和剂量分布、辐射诱导电导率、载流子迁移率、捕获时间和最大捕获密度。对数据的评估得出了迁移寿命产品的值,并表明在考虑的温度范围内,FEP的重封速度快,PI的重封速度慢。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evolution of charge distributions in polymers during annealing
Polymer films of polyfluoroethylenepropylene (FEP) and polyimide (PI) of 25 /spl mu/m thickness are charged with monoenergetic electron beams of a range smaller than the sample thickness. Thereafter, the charge distribution in the thickness direction and its change with time at an annealing temperature of 120/spl deg/C are measured with the laser-induced pressure-pulse (LIPP) method. The experimental data are analyzed with a model of charge buildup during electron-beam irradiation and charge transport during annealing. The model takes into consideration the charge deposition and dose profiles, the radiation-induced conductivity, the carrier mobility, trapping time and maximum trap density. Evaluation of the data yields values of the mobility-lifetime product and shows that retrapping is fast in FEP and slow in PI in the temperature range considered.
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