高性能BiCMOS Si光电子平台

2015 IEEE Bipolar/BiCMOS Circuits and Technology Meeting - BCTM Pub Date : 2015-12-03 DOI:10.1109/BCTM.2015.7340583

D. Knoll, S. Lischke, A. Awny, M. Kroh, E. Krune, C. Mai, A. Peczek, D. Petousi, S. Simon, K. Voigt, G. Winzer, R. Barth, L. Zimmermann

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引用次数: 13

摘要

光子BiCMOS是一种制造电子-光子集成电路的新技术。宽带硅光子器件如锗光电二极管和耗尽型马赫-曾德尔调制器在高性能SiGe BiCMOS基线工艺中进行了单片集成。将回顾集成方面和演示电路的第一个例子。

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High-performance BiCMOS Si photonics platform

Photonic BiCMOS is a novel technology for fabricating electronic-photonic integrated circuits. Broadband silicon photonics devices such as germanium photodiodes and depletion type Mach-Zehnder modulators were monolithically integrated in a high performance SiGe BiCMOS baseline process. Integration aspects and first examples of demonstrator circuits shall be reviewed.

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2015 IEEE Bipolar/BiCMOS Circuits and Technology Meeting - BCTM

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