A. R. Molto, R. T. Doria, M. de Souza, D. Flandre, M. Pavanello
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引用次数: 0
摘要
本研究首次提出了亚微米梯度通道(GC) SOI nmosfet的低频噪声(LFN)在300 K至500 K范围内作为温度的函数。测量的GC SOI器件采用OKI半导体的150nm商用技术。实验结果是在通道长度(L)为240 nm的器件上进行的,工作在VDS=50mV的线性状态下。结果表明,随着温度的升高,噪声的来源由载流子数波动变为迁移率波动。此外,随着温度的升高,噪声的产生和复合对总噪声的影响也很大。
Low-frequency noise of submicron graded-channel SOI nMOSFETs at high temperature
This work presents, for the first time, the Low Frequency Noise (LFN) of submicron graded-channel (GC) SOI nMOSFETs as a function of temperature in the range from 300 K up to 500 K. The measured GC SOI devices are from a 150 nm commercial technology from OKI Semiconductors. The results were obtained through experimental measurements in a device with channel length (L) of 240 nm, working in linear regime at VDS=50mV. It is shown that the origin of the noise changes from carrier number fluctuations to mobility fluctuations as the temperature is increased. Additionally, the generation and recombination noise plays a significant role on the overall noise with the temperature rise.