低压有机气相沉积室

M. Azadmehr, Truls R. Aagaard, Andre Vike, Richard A. G. Tjosvoll, David Gordon
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引用次数: 1

摘要

本文介绍了一种低成本、低压的有机气相沉积室。该腔室允许在同一批次中多层沉积有机材料。考虑到微部件制造中使用的类似系统,该腔室的预算非常低。将有机材料蒽沉积在氧化铟锡(ITO)镀膜玻璃上,对腔体进行了测试和表征。对镀层的均匀性、附着力和厚度进行了验证和分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A low pressure organic vapor phase deposition chamber
In this paper we present a low Cost, low pressure Organic Vapor Phase Deposition chamber. The chamber allows multilayer deposition of organic materials in a same batch. The chamber was made on a very low budget, considering similar systems used in micro component fabrication. Anthracene, an organic material, was deposited onto Indium tin oxide (ITO) coated glass to test and characterize the chamber. Depositing was proved and analyzed regarding uniformity, adhesion and thickness.
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