用于IMEMS CMOS压力传感器的温度补偿子系统

Proceedings Eleventh Annual IEEE International ASIC Conference (Cat. No.98TH8372) Pub Date : 1998-09-13 DOI:10.1109/ASIC.1998.723056

F. Chávez, A. Olmos, C. Azeredo-Leme, E. Charry

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引用次数: 3

摘要

这项工作提出了一个温度补偿子系统的压阻压力微传感器系统工作在0-50千帕医疗用途。不同的满量程和失调电压可以很容易地通过CMOS电路补偿温度效应，该电路产生两个温度相关电压，具有64种可能的温度系数设置:有源电桥的驱动电压和失调抵消DAC的参考电压。该子系统显示出在3伏电源下工作的总功耗约为3兆瓦。

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A temperature compensation subsystem for an IMEMS CMOS pressure sensor

This work presents a temperature compensation subsystem for a piezoresistive pressure microsensor system operating between 0-50 kPa for medical purposes. Different full scale span and offset voltage can be compensated easily against temperature effects with a CMOS circuit that generates two temperature dependent voltages with 64 possible settings of temperature coefficients: the drive voltage of the active bridge and the reference voltage of the offset cancellation DAC. The subsystem showed a total power dissipation of approximately 3 mW working with 3 volts of power supply.

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来源期刊

Proceedings Eleventh Annual IEEE International ASIC Conference (Cat. No.98TH8372)

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