提出了一种利用在线监测数据进行缺陷定量分析和成品率预测的方法

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) Pub Date : 1999-06-12 DOI:10.1109/IWSTM.1999.773188

H. Kikuchi, N. Nishio

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引用次数: 1

摘要

本文提出了一种利用线路监测数据中新的灭杀率进行缺陷定量分析和良率预测的方法。这个击杀率是基于骰子中相同数量的相同类型的缺陷所产生的击杀率的平均值。仿真研究表明，该方法比传统方法更能有效地解决模具上的多缺陷问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A method of quantitative defect analysis and yield forecast by an advanced kill rate from line monitoring data

This paper presents a method for quantitative defect analysis and yield forecast by using a new kill rate from line monitoring data. This kill rate is based on the average of kill rates from dice with the same numbers of the same type of defect occurrences on a die. A simulation study indicated that this new method is superior to conventional methods for multiple defect occurrences on a die.

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来源期刊

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391)

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