利用有效的工艺条件编辑和动态批量进度控制系统缩短ULSI开发周期的方法

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993687

H. Ishizuka, H. Takamori, S. Matsumoto, S. Yamaguchi, T. Arakawa

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引用次数: 0

摘要

我们为ULSI研发线开发了一个CIM系统，该系统具有以下功能，可以提高工艺流程和工艺配方等工艺条件的编辑效率;(1)同时改变多个试验批次的工艺条件;(2)减少编辑每个工艺步骤的晶圆规格的操作。此外，我们的CIM系统通过区分操作员和工程师负责的两种工艺步骤来动态控制试验批次的进度。通过我们的CIM系统，工程师编辑试批工艺条件的时间比以前的CIM系统缩短了不到1/5。

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Approach to shorten ULSI development lead-time by effective process condition editing and dynamic lot-progress control systems

We have developed a CIM system for ULSI R&D lines, which has the following functions to improve the efficiency in editing process condition such as a process flow and a process recipe; (1) altering a process condition of many trial lots simultaneously, (2) reducing the operation of editing wafer specifications of each process step. Moreover, our CIM system controls dynamically the progress of trial lots by distinguishing two kinds of process steps which operators and engineers take charge of. By our CIM system, the time when an engineer edits the process condition of trial lots has become less than 1/5th in comparison with the previous CIM system.

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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