H. Ishizuka, H. Takamori, S. Matsumoto, S. Yamaguchi, T. Arakawa
{"title":"利用有效的工艺条件编辑和动态批量进度控制系统缩短ULSI开发周期的方法","authors":"H. Ishizuka, H. Takamori, S. Matsumoto, S. Yamaguchi, T. Arakawa","doi":"10.1109/ISSM.2000.993687","DOIUrl":null,"url":null,"abstract":"We have developed a CIM system for ULSI R&D lines, which has the following functions to improve the efficiency in editing process condition such as a process flow and a process recipe; (1) altering a process condition of many trial lots simultaneously, (2) reducing the operation of editing wafer specifications of each process step. Moreover, our CIM system controls dynamically the progress of trial lots by distinguishing two kinds of process steps which operators and engineers take charge of. By our CIM system, the time when an engineer edits the process condition of trial lots has become less than 1/5th in comparison with the previous CIM system.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Approach to shorten ULSI development lead-time by effective process condition editing and dynamic lot-progress control systems\",\"authors\":\"H. Ishizuka, H. Takamori, S. Matsumoto, S. Yamaguchi, T. Arakawa\",\"doi\":\"10.1109/ISSM.2000.993687\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed a CIM system for ULSI R&D lines, which has the following functions to improve the efficiency in editing process condition such as a process flow and a process recipe; (1) altering a process condition of many trial lots simultaneously, (2) reducing the operation of editing wafer specifications of each process step. Moreover, our CIM system controls dynamically the progress of trial lots by distinguishing two kinds of process steps which operators and engineers take charge of. By our CIM system, the time when an engineer edits the process condition of trial lots has become less than 1/5th in comparison with the previous CIM system.\",\"PeriodicalId\":104122,\"journal\":{\"name\":\"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2000.993687\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993687","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Approach to shorten ULSI development lead-time by effective process condition editing and dynamic lot-progress control systems
We have developed a CIM system for ULSI R&D lines, which has the following functions to improve the efficiency in editing process condition such as a process flow and a process recipe; (1) altering a process condition of many trial lots simultaneously, (2) reducing the operation of editing wafer specifications of each process step. Moreover, our CIM system controls dynamically the progress of trial lots by distinguishing two kinds of process steps which operators and engineers take charge of. By our CIM system, the time when an engineer edits the process condition of trial lots has become less than 1/5th in comparison with the previous CIM system.