基于模型的产品数量控制

V. Ramakrishnan, D. Walker
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引用次数: 2

摘要

提出了一种用于集成电路产品质量控制的响应面模型的建立方法。采用基于仿真的方法建立模型。这项工作的重点是基于在线、原位和晶圆级电气测试(WET)来控制每个产品的晶圆启动数量。实时决策取决于对特定性能的需求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Model-based product quantity control
A methodology for building Response Surface Models (RSM) for product quantity control of integrated circuits is presented. A simulation based approach is used to build the models. The work focuses on controlling the number of wafer starts devoted to each product based on in-line, in-situ and Wafer-level Electric Tests (WET). Real-time decisions are made depending on the demand for a particular performance bin.
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