深亚微米商业工艺的单事件效应和提示剂量硬度

J. Benedetto
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引用次数: 8

摘要

利用晶圆科技的商业代工厂开发了单事件效应和快速剂量硬化0.25 /spl mu/m的CMOS工艺。硬度仅通过设计硬化技术实现,即没有在商业流程中添加或删除任何工艺变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Single event effects and prompt dose hardness of a deep submicron commercial process
A single event effects and prompt dose hardened 0.25 /spl mu/m CMOS process has been developed using the WaferTech commercial foundry. The hardness was achieved solely using design-hardening techniques, i.e. no process changes were added or removed from the commercial flow.
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