基于ZnO结构的微机械传感器及其对还原性气体的热激活和光激活响应

2017 Spanish Conference on Electron Devices (CDE) Pub Date : 2017-02-01 DOI:10.1109/CDE.2017.7905206

S. Vallejos, I. Gràcia, E. Figueras, C. Cané, N. Pizúrová, J. Hubálek

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引用次数: 0

摘要

采用气溶胶辅助化学气相沉积的方法在硅基微机械平台上生长ZnO棒。评价了光激活和热激活传感器对一氧化碳、乙醇和甲苯的检测特性。结果表明，室温下的光激活反应比250℃下的热激活反应具有更好的响应和选择性。这种特性变得非常有利，因为它允许传感器在没有加热的情况下工作。

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Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases

ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo-activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 °C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.

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2017 Spanish Conference on Electron Devices (CDE)

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