{"title":"光掩模和电路设计复杂性的实现","authors":"P. Buck, F. Kalk, C. West","doi":"10.1109/ISQED.2010.5450555","DOIUrl":null,"url":null,"abstract":"Photomasks have evolved from simple replicators of design layout for lithography to become complex translators of design intent for sub-wavelength imaging systems while at the same time maintaining a cost efficiency that exceeds Moore's Law predictions for scalability in the semiconductor industry. The cost performance of photomasks is reviewed in context to design costs. The life cycle of a photomask product node is examined with respect to capital investment costs. Predictions for future photomask cost challenges are considered.","PeriodicalId":369046,"journal":{"name":"2010 11th International Symposium on Quality Electronic Design (ISQED)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Photomasks and the enablement of circuit design complexity\",\"authors\":\"P. Buck, F. Kalk, C. West\",\"doi\":\"10.1109/ISQED.2010.5450555\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Photomasks have evolved from simple replicators of design layout for lithography to become complex translators of design intent for sub-wavelength imaging systems while at the same time maintaining a cost efficiency that exceeds Moore's Law predictions for scalability in the semiconductor industry. The cost performance of photomasks is reviewed in context to design costs. The life cycle of a photomask product node is examined with respect to capital investment costs. Predictions for future photomask cost challenges are considered.\",\"PeriodicalId\":369046,\"journal\":{\"name\":\"2010 11th International Symposium on Quality Electronic Design (ISQED)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-03-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 11th International Symposium on Quality Electronic Design (ISQED)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISQED.2010.5450555\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 11th International Symposium on Quality Electronic Design (ISQED)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISQED.2010.5450555","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Photomasks and the enablement of circuit design complexity
Photomasks have evolved from simple replicators of design layout for lithography to become complex translators of design intent for sub-wavelength imaging systems while at the same time maintaining a cost efficiency that exceeds Moore's Law predictions for scalability in the semiconductor industry. The cost performance of photomasks is reviewed in context to design costs. The life cycle of a photomask product node is examined with respect to capital investment costs. Predictions for future photomask cost challenges are considered.