一种从快速Q/sub /测试中提取TDDB加速度参数的新技术

1997 IEEE International Integrated Reliability Workshop Final Report (Cat. No.97TH8319) Pub Date : 1997-10-13 DOI:10.1109/IRWS.1997.660287

Y. Chen, J. Suehle, B. Shen, J. Bernstein, C. Messick, P. Chaparala

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引用次数: 0

摘要

提出了一种从高加速恒流注入击穿试验中提取长期恒压应力时变介质击穿加速参数的新方法。这是第一次提出高加速击穿试验与长期TDDB试验的准确相关性。

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A new technique to extract TDDB acceleration parameters from fast Q/sub bd/ tests

A new technique is proposed to extract long-term constant voltage stress time-dependent dielectric breakdown (TDDB) acceleration parameters from highly accelerated constant current injection breakdown tests. This is the first time that an accurate correlation of the highly accelerated breakdown tests to long-term TDDB tests has been presented.

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来源期刊

1997 IEEE International Integrated Reliability Workshop Final Report (Cat. No.97TH8319)

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