金涂层碳纳米管表面作为MEMS器件的低力电触点:第二部分,精细传递机制

J. McBride, S. Spearing, L. Jiang, C. Chianrabutra
{"title":"金涂层碳纳米管表面作为MEMS器件的低力电触点:第二部分,精细传递机制","authors":"J. McBride, S. Spearing, L. Jiang, C. Chianrabutra","doi":"10.1109/HOLM.2011.6034800","DOIUrl":null,"url":null,"abstract":"Material transfer in switching contacts is considered at very low currents, (below 20mA). The transfer process is critical to a wide range of electronic switching technologies and is a limiting factor for MEMs relays. A test system is described and characterized for bench-marking surfaces. This is followed by a study of Multi-walled CNT's (MWCNT's), synthesized on a silicon planar and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a Au coated hemispherical surface. The switching contacts are tested under conditions typical of MEMS relay applications; 4V, 1mA; with a static contact force of 1mN, results are presented on the bounce process and on the opening characteristic with respect to the melting and boiling voltages for the materials tested.","PeriodicalId":197233,"journal":{"name":"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Gold Coated Carbon-Nanotube Surfaces as Low Force Electrical Contacts for MEMS Devices: Part II, Fine Transfer Mechanisms\",\"authors\":\"J. McBride, S. Spearing, L. Jiang, C. Chianrabutra\",\"doi\":\"10.1109/HOLM.2011.6034800\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Material transfer in switching contacts is considered at very low currents, (below 20mA). The transfer process is critical to a wide range of electronic switching technologies and is a limiting factor for MEMs relays. A test system is described and characterized for bench-marking surfaces. This is followed by a study of Multi-walled CNT's (MWCNT's), synthesized on a silicon planar and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a Au coated hemispherical surface. The switching contacts are tested under conditions typical of MEMS relay applications; 4V, 1mA; with a static contact force of 1mN, results are presented on the bounce process and on the opening characteristic with respect to the melting and boiling voltages for the materials tested.\",\"PeriodicalId\":197233,\"journal\":{\"name\":\"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)\",\"volume\":\"82 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-10-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HOLM.2011.6034800\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HOLM.2011.6034800","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12

摘要

在非常低的电流(低于20mA)下考虑开关触点中的材料转移。传输过程对于广泛的电子开关技术至关重要,并且是MEMs继电器的限制因素。描述了一种测试系统,并对其进行了表征。接下来是多壁碳纳米管(MWCNT)的研究,在硅平面上合成并溅射涂覆一层金膜。所述平面安装在压电致动器的尖端,并与镀金的半球形表面配合。开关触点在典型的MEMS继电器应用条件下进行测试;马4 v, 1;在静态接触力为1mN的情况下,给出了弹跳过程和打开特性与被测材料的熔化和沸腾电压的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gold Coated Carbon-Nanotube Surfaces as Low Force Electrical Contacts for MEMS Devices: Part II, Fine Transfer Mechanisms
Material transfer in switching contacts is considered at very low currents, (below 20mA). The transfer process is critical to a wide range of electronic switching technologies and is a limiting factor for MEMs relays. A test system is described and characterized for bench-marking surfaces. This is followed by a study of Multi-walled CNT's (MWCNT's), synthesized on a silicon planar and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a Au coated hemispherical surface. The switching contacts are tested under conditions typical of MEMS relay applications; 4V, 1mA; with a static contact force of 1mN, results are presented on the bounce process and on the opening characteristic with respect to the melting and boiling voltages for the materials tested.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信