浮动电极对高效功率微等离子体VUV光源的屏蔽效应

2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-08-01 DOI:10.1109/OMN.2014.6924563

R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki

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摘要

对MEMS等离子体光源进行了改进。为了实现高效放电，采用了浮动电极。屏蔽该电极的主要部分被发现是进一步有效地节省电力。点火和维持功率分别为5 w和4.5W。它们比报告的ICP型微等离子体(包括批量设置)的值要低。

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Shield effect of floating electrode for power efficient micro-plasma VUV light source

MEMS plasma source for VUV light source is improved. The floating electrode has been introduced for the power efficient discharging. Shielding the major part of that electrode is found to be further effective for saving the power. The ignition and sustaining powers are 5 and 4.5W, respectively. They are lower than the value for ICP type micro-plasma reported including the bulk setup.

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2014 International Conference on Optical MEMS and Nanophotonics

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