{"title":"扫描近场光学显微镜采用悬臂梁集成发光二极管、波导、孔径和光电二极管","authors":"M. Sasaki, K. Tanaka, K. Hane","doi":"10.1109/OMEMS.2000.879659","DOIUrl":null,"url":null,"abstract":"The integrated probe is advantageous for reducing the system size and the alignment labor and for improving the reliability of the SNOM. Even when a multi-functional probe is used, the SNOM system requires to set additional bulky elements. The further integration of the SNOM system is still a great challenge. In this study, a highly integrated cantilever for SNOM is described. All components necessary for the SNOM system (LED light source, waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Scanning near-field optical microscope using cantilever integrated with light emitting diode, waveguide, aperture, and photodiode\",\"authors\":\"M. Sasaki, K. Tanaka, K. Hane\",\"doi\":\"10.1109/OMEMS.2000.879659\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The integrated probe is advantageous for reducing the system size and the alignment labor and for improving the reliability of the SNOM. Even when a multi-functional probe is used, the SNOM system requires to set additional bulky elements. The further integration of the SNOM system is still a great challenge. In this study, a highly integrated cantilever for SNOM is described. All components necessary for the SNOM system (LED light source, waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879659\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879659","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Scanning near-field optical microscope using cantilever integrated with light emitting diode, waveguide, aperture, and photodiode
The integrated probe is advantageous for reducing the system size and the alignment labor and for improving the reliability of the SNOM. Even when a multi-functional probe is used, the SNOM system requires to set additional bulky elements. The further integration of the SNOM system is still a great challenge. In this study, a highly integrated cantilever for SNOM is described. All components necessary for the SNOM system (LED light source, waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.
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