用于x射线数字成像的外延碘化铅薄膜

L. Fornaro, E. Saucedo, L. Mussio, A. Gancharov
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引用次数: 31

摘要

采用物理气相沉积法制备经反复蒸发纯化的碘化铅薄膜。用ICP和湿法测定了原料的纯度和化学计量学。薄膜生长在玻璃衬底上,尺寸为2“/ sp1 × /2”,后电极为钯。根据膜的厚度,将起始材料在高纯度氩气氛(600 mmHg)中以460/spl度/C蒸发1 - 4天,生长碘化铅薄膜。衬底温度设定为200 ~ 250℃。薄膜厚度由/sup 241/Am的59.5 keV辐射透射测量,其值为35至50 /spl mu/m(5%)。用光学显微镜对薄膜进行了结晶度和晶粒尺寸的测定。薄膜的x射线衍射表征和织构计算为[/spl Sigma/I [001]]/[/spl Sigma/I (h k l)]。晶粒尺寸、结晶度和生长择优取向与垂直于衬底的c轴与衬底温度之间存在相关性。随着衬底温度的升高,薄膜的外延性明显增强,薄膜的织构率达到90%左右。还发现了原料纯度和化学计量与外延生长的相关性。为了测量电学和x射线响应特性,探测器由前钯热沉积、钯丝连接和丙烯酸封装组装而成。电阻率5/spl倍/10/sup 14/ /spl ω /。在30v时获得了5pa /cm/sup / /的电流密度。用x射线束辐照检查x射线薄膜的响应,得到线性响应,曝光率和灵敏度约为0.35 /spl mu/C/R。厘米/ 2 /一同坐席。电学性质与衬底温度和外延生长之间的关系再次得到证实。最后,将结果与以往相同材料和替代材料的结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Towards epitaxial lead iodide films for X-ray digital imaging
Lead iodide purified by repeated evaporation was used for growing films by the physical vapor deposition method. Purity and stoichiometry of the starting material were determined by ICP and wet techniques. Films were grown onto glass substrates 2"/spl times/2" in size with palladium as the rear electrode. Lead iodide films were grown by evaporating the starting material at 460/spl deg/C in high purity Ar atmosphere (600 mmHg) during 1 to 4 days, depending on the film thickness. The substrate temperature was prefixed from 200 to 250/spl deg/C. Film thickness was measured by transmission of 59.5 keV radiation from /sup 241/Am giving values from 35 to 50 /spl mu/m (5%). Optical microscopy was performed to the films for determining crystallinity and grain size. Films were characterized by X-ray diffraction and texture was calculated as [/spl Sigma/I [001]]/[/spl Sigma/I (h k l)]. Correlations between grain size, crystallinity and growth preferred orientation with the c axis perpendicular to the substrate with substrate temperature were confirmed. Epitaxy of the films strongly increases with substrate temperature, and films with texture of about 90% were obtained. Correlation between starting material purity and stoichiometry with epitaxial growth were also found. For measuring electrical and X-ray response properties detectors were assembled by front palladium thermal deposition, palladium wire attachment and acrylic encapsulation. Resistivities of 5/spl times/10/sup 14/ /spl Omega/.cm and current densities of 5 pA/cm/sup 2/ at 30 V were obtained. X-ray film response was checked by irradiating with an X-ray beam, giving a linear response with exposure rate and sensitivities of about 0.35 /spl mu/C/R.cm/sup 2/. Again a correlation between electrical properties with the substrate temperature and epitaxial growth was confirmed. Finally, results were compared with previous ones for the same and alternative materials.
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